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Mailing Address:
The Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems
University of Illinois, Department of Mechanical Science and Engineering
1206 W. Green Street, MC-244
Urbana IL 61801
Phone:(217) 265-0093
FAX:(217) 244-9956
Email:nano-cemms@uiuc.edu

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National Science Foundation under NSF Award #0749028 (CMMI).
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