Nano-CEMMS: The Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems

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University of Illinois, Urbana-Champaign
North Carolina A&T State University, Greensboro
University of California - Irvine
Stanford University, Palo Alto
University of Notre Dame
Northwestern University

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Electrochem. Processes Team

3-Dimensional Patterning and Modeling
Solid State Superionic Stamping

3-Dimensional Patterning with Electrochemistry: Status and Current Challenges

Status:

Relatively repeatable fabrication recipes developed for diameters of 100 nm
Arrays of wires produced
Copper and platinum structures demonstrated, others are possible
Freeform structures fabricated

Current Challenges:

A multi-nozzle version of this process is in development.
Fabrication of bi-metallic and alloy wires is being studied.
Applications in electro-chemical wire-bonding of nano-devices, nanowire sensors and probes are underway.

This Web site is supported primarily by the
National Science Foundation under NSF Award #0749028 (CMMI).
© 2009 The Board of Trustees at the University of Illinois