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Solid State Superionic Stamping: Test Results Experimenting with silver films and silver sulfide stamps, high resolution etching with line-widths in the range of 50 nm has been achieved with relatively simple laboratory equipment and in ambient conditions. The process rates are high (up to 5 nm/s of stamp travel into the substrate) and features with (height to lateral dimension) aspect ratios of 2:1 have been produced.
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The Solid-State Superionic Stamping Experimental Setup: (a) X-Y stage with substrate holder; (b) Dual-stage for positioning and feeding stamp; (c) Visco-elastic material and stamp holder; (d) Silver sulfide stamp; (e) Substrate with silver film; (f) Potentiostat; (g) Objective for observing the process. |
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