HOME CONTACT US SITE MAP
University of Illinois, Urbana-Champaign
North Carolina A&T State University, Greensboro
University of California - Irvine
Stanford University, Palo Alto
University of Notre Dame
Northwestern University
 
 
People Research Education Industry Diversity Opportunities Facilities
 
 
  • Research Home
  • Organization Home
  • Electrochem. Processes Team
  • Solid State Superionic Stamping: Test Results

    Experimenting with silver films and silver sulfide stamps, high resolution etching with line-widths in the range of 50 nm has been achieved with relatively simple laboratory equipment and in ambient conditions. The process rates are high (up to 5 nm/s of stamp travel into the substrate) and features with (height to lateral dimension) aspect ratios of 2:1 have been produced.

    The Solid-State Superionic Stamping Experimental Setup: (a) X-Y stage with substrate holder; (b) Dual-stage for positioning and feeding stamp; (c) Visco-elastic material and stamp holder; (d) Silver sulfide stamp; (e) Substrate with silver film; (f) Potentiostat; (g) Objective for observing the process.

     
    National Science Foundation Logo This Web site is supported primarily by the
    National Science Foundation under NSF Award #0749028 (CMMI).
    © 2009 The Board of Trustees at the University of Illinois