Nano-CEMMS: The Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems

Functional Teams:
Cross-functional Teams:

Micro-Nano Fluidic Systems

The goal for this thrust area is to develop the scientific fundamentals and technological know-how for characterizing, designing and fabricating the micro-nano fluidic systems in the Nano-CEMMS toolbit. The center assembles unique capabilities in the fabrication and use of VLSI micro-fluidic circuits, the assembly of systems having micro- and nano-fluidic elements, analysis of fluidic transport at multiple length scales and the integration of sensing into fluidic systems.

Three length scales of features shown in a combinatorial chemistry chip
with integrated photonic sensing from the Kenis and Cunningham laboratories

Example of a microfluidic circuit
from the Quake (at Stanford)
laboratory

Fabricated nozzle trays with 500 nm nozzles


Research Home Organization Home Functional Teams: Manufacturing Systems Micro-Nano Fluidic Systems Nanoscale Sensing Computational Modeling Applications Cross-functional Teams: Molecular Gate Toolbit E-Jet Toolbit Electrochemical Process Micro-Transfer Printing	Micro-Nano Fluidic Systems The goal for this thrust area is to develop the scientific fundamentals and technological know-how for characterizing, designing and fabricating the micro-nano fluidic systems in the Nano-CEMMS toolbit. The center assembles unique capabilities in the fabrication and use of VLSI micro-fluidic circuits, the assembly of systems having micro- and nano-fluidic elements, analysis of fluidic transport at multiple length scales and the integration of sensing into fluidic systems. Three length scales of features shown in a combinatorial chemistry chip with integrated photonic sensing from the Kenis and Cunningham laboratories	Example of a microfluidic circuit from the Quake (at Stanford) laboratory Fabricated nozzle trays with 500 nm nozzles