The goal of this research thrust is twofold: (1) Provide the positioning and control technologies required to realize the Nano-CEMMS process and, (2) Provide the framework for integration of the various capabilities developed in all thrust areas into a physical, functional Nano-CEMMS platform.

The fundamental issues that this thrust address include:

• Nanopositioning: Obtaining multiple-axis, high-bandwidth, sub-nanometer resolution positioning and registration is of immense importance to Nano-CEMMS for obtaining high spatial resolution. While repeatability and resolution are important, accuracy is critical to interchangeability and multi-stage manufacturing processes, making position sensing and calibration important facets of the efforts in positioning. Work within the Center has resulted in innovative parallel-kinematic multi-axis positioning systems, MEMS-based multi-axis positioning, robust control of high bandwidth nanopositioning systems and sensors and techniques for registration.
• Planning and Optimization of Operations in Large-scale Fluidic Systems: Algorithms for designing, assigning and scheduling the operations of large scale microfluidic are addressed in this work.

SOI MEMS stages driven by electrostatic ‘comb’ drives. Inserts show critical components of the stage

Nano positioning stage for experiments and process integration