Process Strategy
The Nano-CEMMS model looks at developing a paradigm for nanomanufacturing that allows nanostructures to be made
from materials with vastly different properties and geometries. Fabrication and co-assembly of new devices and
applications allows heterogeneous integration of optical, electrical, chemical and mechanical functionality into
each volume element. It does so by:
- Building a framework for flexible, yet coordinated operation of large arrays of nano- and micro-processing elements
- Integrating this framework into a manufacturing platform that provides for nanoscale position and registration control
- Creating a supply system for the processing elements using VLSI microfluidics
- Embedding sensing into the system for the robust operation of the process
The Center’s use of molecular gate arrays as process elements holds promise for efficiently and selectively delivering
precise amounts of a desired chemical species.
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